| Furnace |
- 2kW, Max 1000℃ - 주문형 디자인 - 중앙 온도 센서 높이 조작 |
|---|---|
| MFC & Contorl Box |
- Multi Channel MFC(O2, Air, N2, H2 etc) - Auto Control |
| Source Meter |
- Micro Volt and Nano Ampere 단위 Control - Conductivity measurement Soruce |
| Humidifier | - Bubble Humidifier(Optional) |
| Control Software | - Full Automation Control & Monitoring Software Programming |